| The clean room and the cleanliness of suspended particles in the air of the clean area | ||||||
| The air cleanliness (N) | Bigger or equal to the largest limit number of the particle diameter in this table (pc/m3) | |||||
| 0.1um | 0.2um | 0.3um | 5um | 1um | 5um | |
| 1 | 10 | 2 | ||||
| 2 | 100 | 24 | 10 | 4 | ||
| 3 | 1000 | 237 | 102 | 35 | 8 | |
| 4 | 10000 | 237 | 1020 | 352 | 83 | |
| 5 | 100000 | 2370 | 10200 | 3520 | 832 | 29 |
| 6 | 1000000 | 23700 | 102000 | 35200 | 8320 | 293 |
| 7 | 352000 | 83200 | 2930 | |||
| 8 | 3520000 | 832000 | 29300 | |||
| 9 | 35200000 | 8320000 | 293000 | |||
| National standard GB50073-2001 | ||||||
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